Unit 1 Basis of Materials Science

1.1 Introduction

1.2 Materials Science and Engineering

1.3 Classification of Materials

1.4 Advanced Materials

1.5 Microstructure characterization of Materials

Unit 2 Plasmas

2.1 DC Glow Discharge

2.2 RF Discharges

2.3 High-Density Plasmas

Unit 3 Vacuum Technology

3.1 Pressure Ranges and Vacuum Pumps

3.2 Vacuum Seals and Pressure Measurement

Unit 4 Thin Film Deposition

4.1 Physical Deposition

4.2 Chemical Deposition

4.3 Epitaxial Growth

Unit 5 Devices Fabrication Process

5.1 Introduction

5.2 Ion implantation

5.3 Photolithography

5.4 Etch

5.5 Metallization

5.6 Process Integration

Unit 6 Reading Practice

6.1 Paper

6.2 Patent

6.3 Manual Guide

Unit 7 Writing Practice

7.1 Structure of Paper

7.2 Example 1

7.3 Example 2