INTRODUCTION

PART Ⅰ:INFLUENCE OF SURFACE MORPHOLOGY AND MICROSTRUCTURE ON OPTICAL RESPONSE

CHARACTERIZATION OF SURFACE ROUGHNESS

1.1 Introduction

1.2 What Surface Roughness Is

1.3 How Surface Roughness Affects Optical Measurements

1.4 How Surface Roughness and Scattering Are Measured

1.5 Characterization of Selected Surfaces

1.6 Future Directions

CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POLARIZATION-SENSITIVE OPTICAL TECHNIQUES

2.1 Introduction

2.2 Ellipsometry

Experimental Implementations of Ellipsometry

Analysis of Ellipsometry Data

2.3 Microstructural Determinations from Ellipsometry Data

Temperature Dependence of the Optical Properties of Silicon

Determination of the Optical Functions of Glasses Using SE

Spectroscopic Ellipsometry Studies of SiO2/Si

Spectroscopic Ellipsometry for Complicated Film Structures

Time-Resolved Ellipsometry

Single-Wavelength Real-Time Monitoring of Film Growth

Multiple-Wavelength Real-Time Monitoring of Film Growth

Infrared Ellipsometry Studies of Film Growth

THE COMPOSITION,STOICHIOMETRY,AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS

3.1 Introduction

3.2 Aspects of Raman Scattering

3.3 Ⅲ-Ⅴ Semiconductor Systems

3.4 Group Ⅳ Materials

3.5 Amorphous and Microcrystalline Semiconductors

Chalcogenide Glasses

Group Ⅳ Microcrystalline Semiconductors

3.6 Summary

DIAMOND AS AN OPTICAL MATERIAL

4.1 Introduction

4.2 Deposition Methods

4.3 Optical Properties of CVD Diamond

4.4 Defects in CVD Diamond

4.5 Polishing CVD Diamond

4.6 X-ray Window

4.7 Summary

PART Ⅱ:STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES

MULTILAYER OPTICAL COATINGS

5.1 Introduction

5.2 Single-Layer Optical Coatings

Optical Constants

Composition Measurement Techniques

5.3 Multilayer Optical Coatings

Compositional Analysis

Surface Analytical Techniques

Microstructural Analysis of Multilayer Optical Coatings

5.4 Stability of Multilayer Optical Coatings

5.5 Future Compositional and Microstructural Analytical Techniques

CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS

6.1 Introduction

6.2 Origins of Stress

6.3 Techniques for Modifying or Controlling Film Stress

Effect of Deposition Parameters

Effect of Ion-Assisted Deposition

Effect of Impurities

Effect of Post Deposition Annealing

6.4 Stress Measurement Techniques

Substrate Deformation

X-Ray Diffraction(XRD)

Raman Spectroscopy

6.5 Future Directions

SURFACE MODIFICATION OF OPTICAL MATERIALS

7.1 Introduction

7.2 Fundamental Processes

Ion-Solid Interactions

Defect Production,Rearrangement,and Retention

7.3 Ion Implantation of Some Optical Materials

Glasses and Amorphous Silica

α-Quartz(SiO2)

Halides

Sapphire(α-Al2O3)

LiNbO3

Preparation of Optical Components by Ion Implantation

LASER-INDUCED DAMAGE TO OPTICAL MATERIALS

8.1 Introduction

8.2 Laser Damage Definition and Statistics

Defining Damage

Collecting Damage Statistical Data

Types of Damage Probability Distributions

Identification of Pre-Damage Sites

Changing the Damage Threshold

8.3 In Situ Diagnostics

Photothermal Techniques

Particle Emission

8.4 Postmortem Diagnostics

Surface Charge State

Surface Phase and Structure Analysis

8.5 Future Directions

APPENDIX:TECHNIQUE SUMMARIES

1 Auger Electron Spectroscopy(AES)

2 Cathodoluminescence(CL)

3 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope(EELS)

4 Energy-Dispersive X-Ray Spectroscopy(EDS)

5 Fourier Transform Infrared Spectroscopy(FTIR)

6 Light Microscopy

7 Modulation Spectroscopy

8 Nuclear Reaction Analysis(NRA)

9 Optical Scatterometry

10 Photoluminescence(PL)

11 Photothermal Displacement Technique

12 Raman Spectroscopy

13 Rutherford Backscattering Spectrometry(RBS)

14 Scanning Electron Microscopy(SEM)

15 Scanning Transmission Electron Microscopy(STEM)

16 Scanning Tunneling Microscopy and Scanning Force Microscopy(STM and SFM)

17 Static Secondary Ion Mass Spectrometry(Static SIMS)

18 Surface Roughness:Measurement,Formation by Sputtering,Impact on Depth Profiling

19 Total Internal Reflection Microscopy

20 Transmission Electron Microscopy(TEM)

21 Variable-Angle Spectroscopic Ellipsometry(VASE)

22 X-Ray Diffraction(XRD)

23 X-Ray Fluorescence(XRF)

24 X-Ray Photoelectron Spectroscopy(XPS)

Index