1　High-Resolution Scanning Electron Microscopy

1.1 Introduction：Scanning Electron Microscopy and Nanotechnology

1.2 Electron-Specimen Interactions

1.2.1 Electron-Specimen Interactions in Homogeneous Materials

1.2.2 Electron-Speciment Interactions in Composite Samples

1.3 Instrumentation of/the Scanning Electron Microscope

1.3.1 General Description

1.3.2　Performance of a Scanning Electron Microscope

1.4　The Resolution of Secondary and Backscattered Electron Images

Contents

List of Contributors

1.5 Contrast Mechanisms of SE and BE Images of Nanoparticles and Other Systems

1.5.1 Small Particle Contrast in High-Resolution BE Images

1.5.2 Small Particle Contrast in High-Resolution SE Images

1.5.3 Other Contrast Mechanisms

1.6 Applications to Characterizing Nanophase Materials

References

2 High Spatial Resolution Quantitative Electron Beam Microanalysis for Nanoscale Materials

2.1 Introduction

2.2 The Nanomaterials Characterization Challenge：Bulk Nanostructures and Discrete Nanoparticles

2.2.1 Bulk Nanostructures

2.2.2 Nanoparticles

2.3 Physical Basis of the Electron-Excited Analytical Spectrometries

2.4 Nanoscale Elemental Characterization with High Electron Beam Energy

2.4.1 EELS

2.4.2 X-ray Spectrometry

1.7 Summary and Perspectives

2.5 Nanoscale Elemental Characterization with Low and Intermediate Electron Beam Energy

2.5.1 Intermediate Beam Energy X-ray Microanalysis

2.5.2 Low Beam Energy X-ray Microanalysis：Bulk Nanostructures

2.5.3 Auger Spectrometry

2.5.4 Elemental Mapping

2.6 Examples of Applications to Nanoscale Materials

2.6.1 Analytical Electron Microscopy

2.6.2 Low Voltage SEM

2.6.3 Auger/X-ray SEM

2.7 Conclusions

References

3 Characterization of Nano-Crystalline Materials Using Electron Backscatter Diffraction in the Scanning Electron Microscope

3.1 Introduction

3.2 Historical Development of EBSD

3.3 Origin of EBSD Patterns

3.3.1 Collection of EBSD Patterns

3.3.2 Automated Orientation Mapping

3.4.1 Lateral Resolution

3.4 Resolution of EBSD

3.4.2 Depth Resolution

3.5 Sample Preparation of Nano-Materials for EBSD

3.6 Applications of EBSD to Nano-Materials

3.6.1 Heteroepitaxy of Boron Arsenide on［0001］6H-Sic

3.6.2 Electrodeposited Ni for MEMS Applications

3.6.3 Polycrystalline Si For MEMS Applications

3.7 Summary

References

4 High Resolution Transmission Electron Microscopy

4.1 HRTEM and Nanotechnology

4.2 Principles and Practice of HRTEM

4.2.1 Basis of Image Formation

4.2.2 Definitions of Resolution

4.2.3 Lattice Imaging or Atomic Imaging

4.2.4 Instrumental Parameters

4.2.5 Further Requirements

4.2.6 Milestones

4.3 Applications of HRTEM

4.3.1 Semiconductors

4.3.2 Metals

4.3.3 Oxides and Ceramics

4.3.4 Surfaces

4.3.5 Dynamic Events

4.4 Current Trends

4.4.1 Image Viewing and Recording

4.4.2 On-Line Microscope Control

4.4.3 Detection and Correction of Third-Order Aberrations

4.4.4 Quantitative HRTEM

4.4.5 Aberration-Corrected HRTEM

4.5.1 The Stobbs'Factor

4.5 Ongoing Problems

4.5.2 Radiation Damage

4.5.3 Inversion of Crystal Scattering

4.6 Summary and Future Perspective

References

5 Scanning Transmission Electron Microscopy

5.1 Introduction

5.2 STEM Imaging

5.3 STEM Imaging of Crystals

5.3.1 Very Thin Crystals

5.3.2 Dynamical Diffraction Effects

5.3.3 Channeling

5.4 Diffraction in STEM Instruments

5.4.1 Scanning Mode Electron Diffraction

5.4.2 Two-Dimensional Recording Systems

5.4.3 Convergent-Beam Electron Diffraction

5.4.4 Coherent Nanodiffraction

5.5 Microanalysis in STEM

5.5.1 Electron Energy Loss Spectroscopy and Imaging

5.5.2 Secondary Emissions

5.6 Studies of Nanoparticles and Nanotubes

5.6.1 Nanoparticles

5.6.2 Nanotubes and Nanoshells

5.7 Studies of Crystal Defects and Interfaces

5.8 The Structure and Composition of Surfaces

5.8.1 Ultra-High Vacuum Instruments

5.8.2 Reflection Electron Microscopy

5.8.3 Surface Channeling Effects

5.8.4 MEED and MEEM

5.9 Amorphous Materials

5.9.1 Thin Quasi-Amorphous Films

5.9.2 Thick Amorphous Films

5.10 STEM Holography

5.10.1 Gabor's In-Line Holography

5.10.2 Off-Axis Holography

5.11 Ultra-High-Resolution STEM

5.11.1 Atomic Focusers

5.11.2 Aberration Correction

5.11.3 Combining Nanodiffraction and Imaging

5.12 Conclusions

References

6 In-situ Electron Microscopy for Nanomeasurements

6.1 Introduction

6.2 Thermal Induced Surface Dynamic Processes of Nanocrystals

6.3 Measuring Dynamic Bending Modulus by Electric Field Induced Mechanical Resonance

6.3.1 Young's Modulus Measured by Quantifying Thermal Vibration Amplitude

6.3.2 Bending Modulus by Electric Field Induced Mechanical Resonance

6.4 Young's Modulus of Composite Nanowires

6.5 Bending Modulus of Oxide Nanobelts

6.5.1 Nanobelts

6.5.2 Dual-mode Resonance of Nanobelts

6.5.3 Bending Modulus of Nanobelt

6.6 Nanobelts as Nanocantilevers

6.7 In-situ Field Emission from Nanotube

6.8 Work Function at the Tips of Nanotubes and Nanobelts

6.9 Mapping the Electrostatic Potential at the Nanotube Tips

6.10 Field Emission Induced Structural Damage

6.11 Nanothermometer and Nanobearing

6.12 In-situ Transport Measurement of Nanotubes

6.12.1 Ballistic Quantum Conductance at Room Temperature

6.12.2 Quantum Conductance and Surface Contamination

6.12.3 Top Layer Transport in MWNT

6.13 Summary

References

7 Environmental Transmission Electron Microscopy in Nanotechnology

7.1 Introduction

7.2 History of ETEM

7.2.1 Early Developments

7.2.2 Later Developments and Current Status

7.3 Data Collection

7.3.1 Real-Time Imaging Systems

7.3.2 Spectroscopy and Chemical Analysis

7.4 Experimental Design Strategies

7.5 Applications to Nanomaterials

7.5.1 Transformation Mechanisms in Nanostructures due to Gas-solid Reactions

7.5.2 Controlled Synthesis of Nanostructures

7.5.3 Kinetics

7.6 Conclusions

References

8 Electron Nanocrystallography

8.1 Introduction

8.2 Electron Diffraction Modes and Geometry

8.2.1 Selected Area Electron Diffraction

8.2.2 Nano-Area Electron Diffraction

8.2.3 Convergent Beam Electron Diffraction

8.3 Theory of Electron Diffraction

8.3.1 Kinematic Electron Diffraction and Electron Atomic Scattering

8.3.2 Kinematical Electron Diffraction from an Assembly of Atoms

8.3.3 Geometry of Electron Diffraction from Perfect Crystals

8.3.4 The Geometry of a CBED Pattern

8.3.5 Electron Dynamic Theory—the Bloch Wave Method

8.4 Experimental Analysis

8.4.1 Experimental Diffraction Pattern Recording

8.4.2 The Phase Problem and Inversion

8.4.3 The Refinement Technique

8.4.4 Electron Diffraction Oversampling and Phase Retrieval for Nanomaterials

8.5 Applications to Nanostructure Characterization

8.5.1 Structure Determination of Individual Single-Wall Carbon Nanotubes

8.5.2 The Structure of Supported Small Nanoclusters and Epitaxy

8.5.3 Crystal Charge Density

8.6 Conclusions and Future Perspectives

References

9 Tomography Using the Transmission Electron Microscope

9.1 Introduction

9.2 Tomography

9.2.1 A History of Tomography

9.2.2 The Radon Transform

9.2.3 The Central Slice Theorem and Fourier Space Reconstruction

9.2.4 Real Space Reconstruction Using Backprojection

9.3.1 Acquisition

9.3 Tomography in the Electron Microscope

9.3.2 Alignment

9.3.3 Anisotropic Resolution

9.3.4 The Projection Requirement

9.4 STEM HAADF Tomography

9.5 EFTEM Tomography

9.6 Conclusions

References

10 Off-Axis Electron Holography

10.1 Electron Holography and Nanotechnology

10.2 Description of Off-Axis Electron Holography

10.2.1 Experimental Set-up

10.2.2 Basic Imaging Theory and Hologram Reconstruction

10.2.3 Phase Shifts and Mean Inner Potential

10.2.4 Quantification

10.2.5 Practical Considerations

10.3 Nanoscale Electrostatic Fields

10.3.1 Dopant Profiles

10.3.2 Piezoelectric Fields

10.3.3 Charged Defects

10.3.4 Field-Emitting Carbon Nanotubes

10.3.5 Thickness and Sample Morphology

10.4 Nanoscale Magnetic Fields

10.4.1 Patterned Nanostructures

10.4.2 Nanoparticle Chains

10.5 Future Perspectives

References

11 Sub-nm Spatially Resolved EELS(Electron Energy-Loss Spectroscopy):Methods,Theory and Applications

11.1 Introduction:EELS and Nanotechnology

11.2.1 Definition of an EELS Spectrum and of the Basic Information Which It Contains

11.2 Understanding the Information Contained in an EELS Spectrum

11.2.2 Basic Tools Developed for Interpreting and Using Core-Loss Signals

11.3 Spatially Resolved EELS

11.3.1 The 3D Data Cube

11.3.2 Instrumentation Required for Recording the 3D Data Cube，Definition and Estimate of the Spatial and Energy Resolutions

11.4 Elemental Mapping of Individual Nanoparticles Using Core-loss Signals

11.4.1 Data Processing Routines：Background Subtraction，Multiple Least Square Fitting

11.4.2 A Few Examples of Elemental Mapping with EELS Core Edges

11.4.3 Sensitivity，Limits of Detection in EELS Elemental Mapping

11.5 Mapping Bonding States and Electronic Structures with ELNES Features

11.5.1 A Few Selected Examples

11.5.2 From Fingerprint Techniques to Interpretations Requiring Extended Theoretical Calculations

11.6 Conclusions

References

12.1 Introduction

12 Imaging Magnetic Structures Using TEM

12.2 Lorentz Microscopy

12.2.1 Introduction

12.2.2 Magnetic-Shield Lens

12.2.3 Deflection Angle Due to Lorentz Force

12.2.4 Fresnel Mode

12.2.5 Foucault Mode

12.2.6 Lorentz Phase Microscopy

12.3 Electron Holography

12.3.1 Introduction

12.3.2 Observation of Single Magnetic Domain Particles

12.3.3 Real-time Observation

12.3.4 High-precision Observation

12.4 Summary

References

Index